Titanium Sublimation Combination Ion Pumps

Agilent's combination ion pumps (Ion CombiTSP) combine Agilent ion pumps with Titanium Sublimation Pumps (TSP) and cryopanel or ambient shield, for extra high pumping at very low pressures. The best solutions for UHV and XHV systems.

VacIon Plus 150 Combination Pump

150 L/s ion-TSP-cryopanel combination pump in StarCell, diode, and noble diode configurations

VacIon Plus 300 Combination Pump

300 L/s ion-TSP-cryopanel combination pump in StarCell, diode, and noble diode configurations

VacIon Plus 500 Combination Pump

500 L/s ion-TSP-cryopanel combination pump in StarCell, diode, and noble diode configurations

TSP Cartridge

Available in filament or mini-Ti ball style

TSP Cryopanel

Cryoshroud for use with TSP Cartridge

Titanium Sublimation Combination Ion Pumps (TSP)